[1]关小军,关宇昕,王善文.硅单晶圆片中V-O2对演变的相场仿真模型[J].徐州工程学院学报(自然科学版),2019,(03):1-6.
 GUAN Xiaojun,GUAN Yuxin,WANG Shanwen.Simulation Model for V-O2 Pair's Evolution in Silicon Monocrystalline Wafer Based on Phase Field Theory[J].Journal of Xuzhou Institute of Technology(Natural Sciences Edition),2019,(03):1-6.
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硅单晶圆片中V-O2对演变的相场仿真模型()
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《徐州工程学院学报》(自然科学版)[ISSN:1674-358X/CN:32-1789/N]

卷:
期数:
2019年03期
页码:
1-6
栏目:
教授论坛
出版日期:
2019-09-15

文章信息/Info

Title:
Simulation Model for V-O2 Pair's Evolution in Silicon Monocrystalline Wafer Based on Phase Field Theory
文章编号:
1674-358X(2019)03-0001-06
作者:
关小军1关宇昕2王善文1
(1.山东大学 材料科学与工程学院,山东 济南250061; 2.奥派咨询有限责任公司,高科技园 区,埃因霍温 荷兰5656AE)
Author(s):
GUAN Xiaojun1GUAN Yuxin2WANG Shanwen1
(1.School of Material Science and Engineering,Shandong University,Jinan 250061,China; 2.Outpie Partners B.V.,High Tech Campus,Eindhoven 5656AE,Netherlands)
关键词:
仿真 硅单晶圆片 V-O2 建模 相场理论
Keywords:
simulation silicon monocrystalline wafer V-O2 pair model phase field theory
分类号:
TG111
文献标志码:
A
摘要:
为了开展低温退火过程硅单晶圆片中V-O2对演变的仿真研究,基于相场理 论创建了仿真模型,首次完成了介观的V-O2对存在状态及其数量演变的模拟.结 果表明:随着退火时间延长,V-O2对数量增加直至饱和且点缺陷相对浓度分布由 非平衡态转变为平衡态; 这两个演变规律符合实际且产生机理清晰,证实了该模型的合理性 及其使用价值.
Abstract:
In order to simulatethe V-O2 pair's evolution in silicon monocrystalline wafer in the process of low temperature annealing,a simulation model was established based on the theory of phase field.The simulations on the mesoscopic evolution of V-O2 pair's existence state and its number were first finished.The simulation results show that with the prolongation of annealing time,the number of V-O2 pair increases until to saturation and the relative concentration distribution of point defects changes from non- equilibrium state to equilibrium one; the two evolution laws are in line with the reality and the mechanism is clear,which confirms the application rationality of the model.

参考文献/References:

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备注/Memo

备注/Memo:
收稿日期:2019-05-07 基金项目:高等学校博士学科点专项科研基金项目(200804220021); 山东大学晶体材料国家 重点实验室开放课题(KF1303) 作者简介:关小军(1952-),男,教授,博士,博士生导师,主要从事材料组织结构演变计算机模 拟、材料组织结构优化的工艺控制研究.
更新日期/Last Update: 2019-09-15